Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung
| dc.contributor.author | Waldbaur, Ansgar | * |
| dc.date.accessioned | 2021-02-11T12:42:49Z | |
| dc.date.available | 2021-02-11T12:42:49Z | |
| dc.date.issued | 2013 | * |
| dc.date.submitted | 2019-07-30 20:02:02 | * |
| dc.identifier | 35638 | * |
| dc.identifier.issn | 18695183 | * |
| dc.identifier.uri | https://directory.doabooks.org/handle/20.500.12854/46578 | |
| dc.description.abstract | In this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and casting. Also, bio-chemical ligand patterns comprising 256 different ligand densities have been created in a few seconds on a 5 mm² substrate with pixel sizes of a few µm. | * |
| dc.language | German | * |
| dc.relation.ispartofseries | Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik | * |
| dc.subject | T1-995 | * |
| dc.subject.classification | thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issues | en_US |
| dc.subject.other | Mikrofluidikchip | * |
| dc.subject.other | Rapid Prototyping | * |
| dc.subject.other | Mikrospiegelarray | * |
| dc.subject.other | Ligandenmuster | * |
| dc.subject.other | Lithographie | * |
| dc.title | Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung | * |
| dc.type | book | |
| oapen.identifier.doi | 10.5445/KSP/1000036845 | * |
| oapen.relation.isPublishedBy | 68fffc18-8f7b-44fa-ac7e-0b7d7d979bd2 | * |
| oapen.relation.isbn | 9783731501190 | * |
| oapen.pages | XVI, 133 p. | * |
| oapen.volume | 19 | * |
| peerreview.review.type | Full text | |
| peerreview.anonymity | All identities known | |
| peerreview.reviewer.type | Editorial board member | |
| peerreview.reviewer.type | External peer reviewer | |
| peerreview.review.stage | Pre-publication | |
| peerreview.open.review | No | |
| peerreview.publish.responsibility | Books or series editor | |
| peerreview.id | 51a542ec-eaeb-47c2-861d-6022e981a97a | |
| peerreview.title | Dissertations in Series (Dissertationen in Schriftenreihe) |
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