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Entwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung

dc.contributor.authorWaldbaur, Ansgar*
dc.date.accessioned2021-02-11T12:42:49Z
dc.date.available2021-02-11T12:42:49Z
dc.date.issued2013*
dc.date.submitted2019-07-30 20:02:02*
dc.identifier35638*
dc.identifier.issn18695183*
dc.identifier.urihttps://directory.doabooks.org/handle/20.500.12854/46578
dc.description.abstractIn this work, a maskless lithography device based on a micro-mirror array was designed and built. Single projection frames are seamlessly projected next to each other. Microfluidic chips of several cm² size comprising channels of 50 µm have been built of various polymers via direct lithography and casting. Also, bio-chemical ligand patterns comprising 256 different ligand densities have been created in a few seconds on a 5 mm² substrate with pixel sizes of a few µm.*
dc.languageGerman*
dc.relation.ispartofseriesSchriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik*
dc.subjectT1-995*
dc.subject.classificationthema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TB Technology: general issuesen_US
dc.subject.otherMikrofluidikchip*
dc.subject.otherRapid Prototyping*
dc.subject.otherMikrospiegelarray*
dc.subject.otherLigandenmuster*
dc.subject.otherLithographie*
dc.titleEntwicklung eines maskenlosen Fotolithographiesystems zum Einsatz im Rapid Prototyping in der Mikrofluidik und zur gezielten Oberflächenfunktionalisierung*
dc.typebook
oapen.identifier.doi10.5445/KSP/1000036845*
oapen.relation.isPublishedBy68fffc18-8f7b-44fa-ac7e-0b7d7d979bd2*
oapen.relation.isbn9783731501190*
oapen.pagesXVI, 133 p.*
oapen.volume19*
peerreview.review.typeFull text
peerreview.anonymityAll identities known
peerreview.reviewer.typeEditorial board member
peerreview.reviewer.typeExternal peer reviewer
peerreview.review.stagePre-publication
peerreview.open.reviewNo
peerreview.publish.responsibilityBooks or series editor
peerreview.id51a542ec-eaeb-47c2-861d-6022e981a97a
peerreview.titleDissertations in Series (Dissertationen in Schriftenreihe)


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