Entwicklung eines Röntgenmikroskops für Photonenenergien von 15 keV bis 30 keV

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https://www.ksp.kit.edu/9783731502630
Author(s)
Marschall, Felix
Language
German
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Abstract
In many research areas X-rays are used for analysis. In X-ray full field microscopy a high resolution is achievable independent of the source properties by using imaging lenses. With an objective lens with 100 mm focal length a theoretical resolution of 60nm is achievable at 30 keV. In Experiments a resolution of 200 nm for a field of view of 80 µm
URI
https://directory.doabooks.org/handle/20.500.12854/46583
Keywords
Röntgenmikroskopie; OptikX-ray microscopy; Vollfeldmikroskopie; Mikrostrukturtechnik; refraktive Linse; full-field-microscopy; refractive lens; optics; microstructure technology
DOI
10.5445/KSP/1000043064
ISBN
9783731502630
Publisher
KIT Scientific Publishing
Publisher website
http://www.ksp.kit.edu/
Publication date and place
2014
Series
Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie / Hrsg.: Institut für Mikrostrukturtechnik,
Classification
Technology: general issues
Pages
IX, 126 p.
Review type
Full text
Anonymity
All identities known
Reviewer type
Editorial board member; External peer reviewer
Review stage
Pre-publication
Open review
No
Publish responsibility
Books or series editor
Rights
https://creativecommons.org/licenses/by-sa/4.0/
https://creativecommons.org/licenses/by-sa/4.0/
Except where otherwise noted, this item's license is described as https://creativecommons.org/licenses/by-sa/4.0/