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Langzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis

dc.contributor.authorKopf, Marlene
dc.date.accessioned2022-04-05T04:01:23Z
dc.date.available2022-04-05T04:01:23Z
dc.date.issued2022
dc.date.submitted2022-04-04T14:53:17Z
dc.identifierONIX_20220404_9783731511212_6
dc.identifier1869-5183
dc.identifierhttps://library.oapen.org/handle/20.500.12657/53694
dc.identifier.urihttps://directory.doabooks.org/handle/20.500.12854/80561
dc.description.abstractDue to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.
dc.languageGerman
dc.relation.ispartofseriesSchriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie
dc.rightsopen access
dc.subject.otherMEMS-Sensor
dc.subject.otherDrehratensensor
dc.subject.otherInertialsensor
dc.subject.otherDämpfung
dc.subject.otherQ-Faktor
dc.subject.otherMEMS sensor
dc.subject.othergyroscope
dc.subject.otherinertial sensor
dc.subject.otherdamping atmosphere
dc.subject.otherQ factor
dc.subject.otherthema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials
dc.titleLangzeitstabilität der Innendrücke von Kavernen benachbarter MEMS-Sensoren auf Siliziumbasis
dc.typebook
oapen.identifier.doi10.5445/KSP/1000136062
oapen.relation.isPublishedBy68fffc18-8f7b-44fa-ac7e-0b7d7d979bd2
oapen.relation.isbn9783731511212
oapen.imprintKIT Scientific Publishing
oapen.pages220
oapen.place.publicationKarlsruhe
dc.seriesnumber42
dc.abstractotherlanguageDue to a trend towards miniaturization of many MEMS devices and thus also the cavity volumes of inertial sensors, the influence of slight changes in the damping atmosphere in sensor cavities on the reliability of the sensors is increasing. In this work, mechanisms affecting the pressure stability of gyroscopes are investigated and countermeasures are presented. A focus is placed on desorption sources as well as gas diffusion paths in the sensor layer stack.


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