Refraktive Multifokusröntgenlinsen und Hartmann-Shack-Sensoren

Opolka, Alexander

doi:10.5445/KSP/1000168831

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https://library.oapen.org/bitstream/20.500.12657/92886/1/refraktive-multifokusrontgenlinsen-und-hartmann-shack-sensoren.pdf

Author(s)

Opolka, Alexander

Language

German

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Abstract

Compound refractive X-ray lenses (CRLs) have an absorption-limited numerical aperture. In this work, an array of CRLs with slightly inclined optical axes is used to circumvent this limitation in full-field microscopy at laboratory sources. Among other things, fabrication of CRLs via deep X-ray lithography and parallel fields of CRLs (Shack-Hartmann wavefront sensor, scanning imaging methods) are discussed.

URI

https://directory.doabooks.org/handle/20.500.12854/143339

Keywords

Multi-CRL; Shack-Hartmann sensor; full-field microscopy; LIGA; Multiröntgenlinse; Hartmann-Shack Sensor; Vollfeldmikroskopie; CRL; thema EDItEUR::T Technology, Engineering, Agriculture, Industrial processes::TG Mechanical engineering and materials

Publication date and place

2024

Series

Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie,

Pages

140

Rights

https://creativecommons.org/licenses/by-sa/4.0/

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Except where otherwise noted, this item's license is described as open access