Refraktive Multifokusröntgenlinsen und Hartmann-Shack-Sensoren

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https://oapen-dev.siscern.org/bitstream/20.500.12657/92886/1/refraktive-multifokusrontgenlinsen-und-hartmann-shack-sensoren.pdf
Author(s)
Opolka, Alexander
Collection
AG Universitätsverlage
Language
German
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Abstract
Compound refractive X-ray lenses (CRLs) have an absorption-limited numerical aperture. In this work, an array of CRLs with slightly inclined optical axes is used to circumvent this limitation in full-field microscopy at laboratory sources. Among other things, fabrication of CRLs via deep X-ray lithography and parallel fields of CRLs (Shack-Hartmann wavefront sensor, scanning imaging methods) are discussed.
URI
https://doab-dev.siscern.org/handle/20.500.12854/173049
Keywords
Multi-CRL; Shack-Hartmann sensor; full-field microscopy; LIGA; Multiröntgenlinse; Hartmann-Shack Sensor; Vollfeldmikroskopie; CRL
DOI
10.5445/KSP/1000168831
ISBN
9783731513490
Publisher
KIT Scientific Publishing
Publisher website
http://www.ksp.kit.edu/
Publication date and place
2024
Series
Schriften des Instituts für Mikrostrukturtechnik am Karlsruher Institut für Technologie,
Classification
Mechanical engineering and materials
Pages
140
Review type
Full text
Anonymity
All identities known
Reviewer type
Editorial board member; External peer reviewer
Review stage
Pre-publication
Open review
No
Publish responsibility
Books or series editor
Rights
https://creativecommons.org/licenses/by-sa/4.0/
open access
Except where otherwise noted, this item's license is described as open access